You can use any resist as long as it's thick enough. DLC etches fast in O2
plasma
Shay

-----Original Message-----
From: Deilton Reis Martins
Subject: [mems-talk] su-8 and diamond

I would like to use the diamond CVD like structure layer.

For plasma etching of O2, is it possible etch the diamond using de SU-8
resist like mask ???