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MEMSnet Home: MEMS-Talk: Silicon etching
Silicon etching
2005-05-09
Nik Dee
2005-05-09
Jesse D Fowler
2005-05-10
Nik Dee
2005-05-10
Brent Garber
2005-05-10
Jesse D Fowler
2005-05-10
Wilson, Thomas
Silicon etching
Jesse D Fowler
2005-05-10
Gold does require an adhesion layer to stick to silicon. the most common are Ti
and Cr. Ti has lower stress, and Cr is more etch resistant (particularly to HF
or BOE). I've used 10 to 20 nm for an adhesion layer thickness.

Jesse Fowler
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