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MEMSnet Home: MEMS-Talk: Ohmic contact
Ohmic contact
2005-05-10
leo Won
Ohmic contact
leo Won
2005-05-10
Hello everyone

I am trying to make an ohmic contact on the backside of a low doped Si(111).
The problem is that the sample should be heat up to 1100 C to form 7x7
pattern, This means ohmic contact should be stable at 1100 C. Usual
method to make an ohmic contact don't work for this because it is not
stable at high temperatures.

Does anybody know what kind of material I can use to form an ohmic
contact on backside for this temperature?

Thank You
Leo
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