SU-8 would work as an etch mask for KOH.  The problem is, you will not
be able to strip it.  I am not sure if the approved strip method for
SU-8 (lift-off using OmniCoat) would stand up to the KOH bath.

Best Regards,
Chad Brubaker

 -----Original Message-----
From: [email protected]
Subject: Re: [mems-talk] photoresist mask for KOH etching

Carol,

I don't think resist will work in KOH. I tried using photo resist  in
KOH it just dissolves. I use Nitride as a mask for KOH.