Ramon,

For AZ P4330, 4000 rpm is about 3 micron, 1000 rpm is about 6.6 micron,
based on my experiments.

Yours sincerely,

Isaac Chan, Ph.D.
University of Waterloo


>  -----Original Message-----
> From: Ramon F. Figueroa
> Subject: [mems-talk] AZ photoresists
>
> I am having trouble with thickness, under/over exposure, and under/over
> development of AZ4110 and AZ4330 photoresists.  Does anyone has some
> data on PR thickness vs rpm's exposure dose vs PR thickness development
> time vs PR thickness or other info that could help me?