A
MEMS Clearinghouse
®
and information portal
for the MEMS and Nanotechnology community
Register
Sign-In
MEMSnet Home
About Us
What is MEMS?
Beginner's Guide
Discussion Groups
Advertise Here
News
MEMSnet Home
:
MEMS-Talk
:
Wet-Etch SiO2/Si3N4
Wet-Etch SiO2/Si3N4
2005-05-12
Josef Kouba
2005-05-12
[email protected]
2005-05-12
Brent Garber
2005-05-12
[email protected]
Wet-Etch SiO2/Si3N4
Josef Kouba
2005-05-12
Dear MEMS members, what is a good wet etchant for SiO2 which leaves Si3N4 intact? Thank you J.
reply
Events
Glossary
Materials
Links
MEMS-talk
