Hi,

please take a look at Suss Delta Serie:
http:/radact.suss.com/deltaseries/D080T.pdf

We use it in our Clean Room for a lot of processes.
Good luck,

Vitali Emelianov


-----Ursprüngliche Nachricht-----
Von: Jessica Melin
Betreff: [mems-talk] Photoresist Spinners

Does anyone have good tips on photresist spinner suppliers? Have already
checked out Solitec, Convac, Specialty Coating Systems, and Laurell. Am
looking for photoresist or polymer spinners with the ability to extract
recipe data to a storage device or computer. Any tips would be greatly
appreciated.