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MEMSnet Home: MEMS-Talk: Wet-Etch SiO2/Si3N4
Wet-Etch SiO2/Si3N4
2005-05-12
Josef Kouba
2005-05-12
bobhendu@aol.com
2005-05-12
Brent Garber
2005-05-12
galindo818@aol.com
Wet-Etch SiO2/Si3N4
galindo818@aol.com
2005-05-12
BHF/BOE

-----Original Message-----
From: Josef Kouba 
Subject: [mems-talk] Wet-Etch SiO2/Si3N4

what is a good wet etchant for SiO2 which leaves Si3N4 intact?
reply
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