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MEMSnet Home: MEMS-Talk: recipe for RIE pyrex glass
recipe for RIE pyrex glass
2005-05-16
Thomas Xu
recipe for RIE pyrex glass
Thomas Xu
2005-05-16
Hi,

Could anyone provide me a good recipe for etching ~1um
deep borofloat glass by  STS RIE?

Thanks!

Thomas




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