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MEMSnet Home: MEMS-Talk: Re: XeF2 Silicon Etching
Re: XeF2 Silicon Etching
1998-03-13
[email protected]
1998-03-13
Robert Dean
1998-03-13
Albert K. Henning
1998-03-13
Paul M. Zavracky
1998-03-13
[email protected]
1998-03-13
Michael Young
Re: XeF2 Silicon Etching
Robert Dean
1998-03-13
At 04:44 PM 3/10/98 -0600, you wrote:
>We have an immidiate application in high volume manufacturing for
>etching silicon about 75u deep on both sides of the wafer.
>Would love to chat with someone.
>
>avi laker
>Teccor Electronics
>972-756-8237
>

Hello.  Auburn University, Auburn, Alabama, USA, has developed a process for
etching at least 200um into silicon.  The contact person is Charles Ellis,
the AMSTC Laboratory Manager.  His phone number is (334) 844-1883.  I hope
this helps.

Sincerely,

Robert Dean
RF CMOS Designer
MEMS Optical
205 Import Circle
Suite 2
Huntsville, AL 35806
Tel. 205-859-1886
FAX 205-859-5890
email [email protected]


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