>I am sure this group must be having people working on BioMEMS. I just
>wanted to know if anyone here has come across an analytical model for
>deflection of a cantilever with surface stress. I already have a paper
>which gives experimental results on this, however, there is no analytical
>model.

Dear Sudhanshu,

There is already a good deal of work on using cantilevers actuated by a
surface stress as biochemical sensors. A good place to start looking at
this work is the IBM Zurich group - website below:

http://www.zurich.ibm.com/st/nanoscience/biochemical.html

Stoney's equation relates the radius of curvature of a cantilever to the
applied surface stress in a simple manner. A more theoretical analysis by
John Sader in Melbourne is published in the Journal of Applied Physics
(Vol. 89 No. 5 p. 2911 (2001)) - this also quotes Stoney's formula.

Hope this helps,

James