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MEMSnet Home: MEMS-Talk: BCB 4024-40 EXPOSURE
BCB 4024-40 EXPOSURE
2005-05-20
#ZHOU QIAOER#
BCB 4024-40 EXPOSURE
#ZHOU QIAOER#
2005-05-20
Dear All,

When exposing BCB 4024-40, does the mask have any effects on the
patterning?
Do you guys have any experience on BCB process? I feel that it is quite
difficult to control the process. BCB is just so sensitive.

thanks
Yours,
Joyce
reply
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