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MEMSnet Home: MEMS-Talk: Deep Silicon Etching
Deep Silicon Etching
2005-05-23
Mac McReynolds
Deep Silicon Etching
Mac McReynolds
2005-05-23
I am investigating microfluidic structures in silicon.  Can anyone recommend a
source that can fabricate 1:1 trenches/structures in the range of 20-100 microns
deep in silicon??  Feel free to contact me directly.

Mac McReynolds
Process Development Manager
Caliper Life Sciences
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