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MEMSnet Home: MEMS-Talk: metal layer between SU-8 layers
metal layer between SU-8 layers
2005-05-24
Chen-Han Lee
metal layer between SU-8 layers
Chen-Han Lee
2005-05-24
Hi members,

I am doing a two layer SU-8 structure with a layer of metal in between.
Could anyone suggest the thickness and the metal to sputter or evaporate
onto the first layer of SU-8?

Thanks in advance.

Chenhan


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