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MEMSnet Home: MEMS-Talk: SU-8 on 6 inch wafers & PDMS casting trays
SU-8 on 6 inch wafers & PDMS casting trays
2005-05-25
Dwayne Dunaway
2005-05-25
Lee Pang
2005-05-25
Brubaker Chad
2005-05-26
Brubaker Chad
2005-05-26
Dwayne Dunaway
SU-8 on 6 inch wafers & PDMS casting trays
Dwayne Dunaway
2005-05-25
Hello,

I am interested in casting PDMS on 6 inch wafers.

Two questions..

Does SU-8 give predictable thicknesses on 4 inch
wafers?

Does anyone have any recommendations for casting trays
for 6 inch wafers and PDMS?  We use these nifty little
aluminum trays from Small Parts Inc. for 4 inch wafers
but they are not available to fit 6 inch sizes.

Any input would be appreciated.

Dwayne Dunaway
Nanostring Technologies
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