This goes for 6" as well - as a matter of fact, EBR is less of a
concern, because the edge bead is a smaller percentage of the wafer
surface.

Best Regards,
Chad Brubaker

 -----Original Message-----
From:   [email protected] [mailto:[email protected]]  On
Behalf Of Dwayne Dunaway
Sent:   Wednesday, May 25, 2005 12:15 PM
To:     [email protected]
Subject:        [mems-talk] SU-8 on 6 inch wafers & PDMS casting trays

I am interested in casting PDMS on 6 inch wafers.

Two questions..

Does SU-8 give predictable thicknesses on 4 inch
wafers?

Does anyone have any recommendations for casting trays
for 6 inch wafers and PDMS?  We use these nifty little
aluminum trays from Small Parts Inc. for 4 inch wafers
but they are not available to fit 6 inch sizes.