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MEMSnet Home: MEMS-Talk: Polyimide Release Agent
Polyimide Release Agent
2005-05-26
erkin seker
2005-05-26
Oliver Horn
inquire about Parylene coating system?
2005-05-26
Xiaotong Gao
2005-05-27
mizur
2005-05-26
Dr Michael Cooke
2005-05-26
Michael D Martin
2005-05-27
MartinDümling
2005-05-26
[email protected]
2005-05-27
Philip Choi
2005-05-27
Michael D Martin
Polyimide Release Agent
erkin seker
2005-05-26
Hi,

Is anybody aware of a release agent for polyimide films?  I would like to
spin the polyimide onto a wafer, pattern it, and then peel it off intact.
I would greatly appreciate any help.

Thank you.

Erkin Seker
reply
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