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MEMSnet Home: MEMS-Talk: Polyimide Release Agent
Polyimide Release Agent
2005-05-26
erkin seker
2005-05-26
Oliver Horn
inquire about Parylene coating system?
2005-05-26
Xiaotong Gao
2005-05-27
mizur
2005-05-26
Dr Michael Cooke
2005-05-26
Michael D Martin
2005-05-27
MartinDümling
2005-05-26
[email protected]
2005-05-27
Philip Choi
2005-05-27
Michael D Martin
Polyimide Release Agent
Oliver Horn
2005-05-26
Hi Erkin,

I did it once, by testing polyimde-like Durimid on silicodioxe in
HF(49%). The Durimid got of the wafer as hole film.

Best regards,

Oliver Horn
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