Krishna,
If you only need 2-3 um. why use (SOG)
PECVD TEOS is a conformal dielectric material and is readily available.

Glenn

-----Original Message-----
From: Krishna Vummidi [mailto:[email protected]]
Subject: [mems-talk] reg: spin on glass

Im trying to find information on Spin on glass (SOG). I need to use it as a
dielectric layer which i should be able to pattern using normal positive
photo-resist and etch back (say using HF). The maximum thickness i need to
go is about 2-3 um. Any suggestions of other patternable dielectric material
is also welcome. The vendors i have contacted have posed a limitation on
thickness on SOG due to films cracking at higher thickness/temp.