You could try a sacrificial gold layer sputtered in a SEM coater, or
possibly try SU8 under that may work

Dr. Michael Cooke
Microsystems Technology Group
School Of Engineering
University of Durham

----- Original Message -----
From: "erkin seker" 
Subject: [mems-talk] Polyimide Release Agent

> Is anybody aware of a release agent for polyimide films?  I would like to
> spin the polyimide onto a wafer, pattern it, and then peel it off intact.
> I would greatly appreciate any help.