Try MCNC short coursenotes, There are short courses in MIT, CWRU, U.Michgan
and UC Berkeley.Too

Wen


I believe I have an application for MEMS technology in one of my current
>design projects. However, I know very little about the subject. Can anyone
>recommend an introductory text or design guide. The design requires a
>microvalve for use with high temperature gasses.
>
>Thank you in advance
>
>Rob Pearce
>