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MEMSnet Home: MEMS-Talk: Gettering rate
Gettering rate
2005-05-27
Vikram Patil
2005-05-27
Erik Jung
RIE of glass with SF6
2005-05-27
Alok Jain
Gettering rate
Vikram Patil
2005-05-27
Hi all.

Can anyone give some information about calculating gettering rate?

Thanks in advance.
Regards,
Vikram.


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