Get yourself some poly(vinyl alcohol).  Water soluble.

Philip Choi * PhD Candidate * Electrical Engineering * University of
Michigan
http://www.eecs.umich.edu/~choip/

> From: "erkin seker" 
> Subject: [mems-talk] Polyimide Release Agent
>
> Is anybody aware of a release agent for polyimide films?  I would like
> to
> spin the polyimide onto a wafer, pattern it, and then peel it off
> intact.
> I would greatly appreciate any help.