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MEMSnet Home: MEMS-Talk: Gettering rate
Gettering rate
2005-05-27
Vikram Patil
2005-05-27
Erik Jung
RIE of glass with SF6
2005-05-27
Alok Jain
Gettering rate
Erik Jung
2005-05-27
you might directly ask e.g. a manufacturer of getter materials. Try SAES
Getter in Italy...
Erik

-----Ursprüngliche Nachricht-----
Von: Vikram Patil
Betreff: [mems-talk] Gettering rate

Can anyone give some information about calculating gettering rate?
reply
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