Dear Xiaotong,
if you need something for small scale experiments, you can build one
yourself. I had one we built about  5 years ago with a 5" dia 6" tall
chamber.
I can give you more detials if you want to try to go for it.

Shay
----- Original Message -----
From: "Xiaotong Gao" 
Subject: [mems-talk] inquire about Parylene coating system?

> Is there any Parylene coating system which is more compact than PDS 2010?
> I will appreciate your kind recommendations!