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MEMSnet Home: MEMS-Talk: Ni to SU8 adhesion problem
Ni to SU8 adhesion problem
2005-05-27
[email protected]
2005-05-27
Bill Moffat
Ni to SU8 adhesion problem
Bill Moffat
2005-05-27
Vacuum vapor prime with HMDS will totally dehydrate the Ni surface and
replace Hydroxyl bonds with outward facing Methyl chains.  This wil help
any organic to stick.  Plasma cleaning will increase the surface area
which may also help. I can arrange free trials of both and or
combination if you want to test it.

Bill Moffat, CEO
Yield Engineering Systems, Inc.
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