Dear Colleague,

What is the world record for the height of a MEMS structure out of the plane?

My research interest is in using arrays of MEMS structures to interact
mechanically with the physical world. In this case it is useful to be able to
sense and influence the environment as far as possible away from the surface.
The polyimide curling fingers of Fujita, the miniature airbrakes of flaps of
Caltech, the grippers of Pister at UCLA are all instances of this capability.
Lots of applications spring to mind. The basic capability is to get both height
and lateral motion at the tip of the MEMS structure.

Can anyone help me in finding out the state of the art, give me references,
pointers to the literature, people I should talk to etc.

Thank You and Regards,

Peter Will