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MEMSnet Home: MEMS-Talk: e-beam evaporation of pyrex glass
e-beam evaporation of pyrex glass
1998-04-30
decai sun
e-beam evaporation of pyrex glass
decai sun
1998-04-30
Anyone has experience with the e-beam evaporation of Pyrex glass? We have
tried to evaporate Pyrex glass by e-beam and experienced flaks on the
surface besides good thin film deposition. Any input would be appreciated.

Decai
************************************************
Decai Sun, Ph. D
Electronic Materials Lab
Xerox Palo Alto Research Center
Palo Alto, CA 94304
phone:650-812-4169, fax:650-812-4105
email:[email protected]
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