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MEMSnet Home: MEMS-Talk: AZ 5214E layer thickness in spin-coating process
AZ 5214E layer thickness in spin-coating process
2005-06-16
Julie Verstraeten
2005-06-16
Cristi Lepadatu
2005-06-17
vlaminck vincent
2005-06-17
maryla krolikowska
2005-06-17
Farid Fouchal
AZ 5214E layer thickness in spin-coating process
Julie Verstraeten
2005-06-16
Hello All,

I'm looking for any formula that relates the layer thickness to de rotation
velocity in the spin-coating process for AZ 5214E photoresist.

Could anyone help me?

Thank you

Regards,
Julie.
reply
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