Hello,
If this can help, a quick curve fitting using Maryla numbers gives:

Y = 90.752 ((X)^(-0.5031))

With an  R^2 = 1

Y=thickness
X=rotation velocity

Farid

-----Original Message-----
From: maryla krolikowska
Subject: Re: [mems-talk] AZ 5214E layer thickness in spin-coating process

rpm     thickness in imc
2000     1.98

3000     1.62
4000     1.40
5000     1.25
6000     1.14

Maryla