I am seeking information concerning the conversion of a Tegal 701 plasma
etcher, from a plasma etch configuration, to a reactive ion etch
configuration. In particular, I'm looking for the names of those
skilled in making this kind of etch conversion. Please contact me at
one of the addresses below.
Best regards, Al Henning
--
Albert K. Henning, Ph.D. 650/617-0854 (Office)
Redwood Microsystems 650/326-9217 (FAX)
1020 Hamilton Avenue [email protected]
Menlo Park, CA 94025 http://www.redwoodmicro.com
