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MEMSnet Home: MEMS-Talk: 5214E resist
5214E resist
2005-07-24
Krishna Vummidi
2005-07-25
Jesse D Fowler
2005-07-25
Kasman , Elina
2005-07-25
Jobert van Eisden
5214E resist
Jesse D Fowler
2005-07-25
Hi Krishna,
THat looks similar to my image-reversal process, except I use AZ 400K 1:5 for
developing. The image-reversed resist seems more fragile. However, I have only
used image reversal to convert an etch mask to a lift-off mask, so I did not
evaluate the quality
of the edges.
Jesse Fowler

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