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MEMSnet Home: MEMS-Talk: SiO2 over gold
ANSYS command for deposition
2005-08-02
maryala shivakumar
SiO2 over gold
2005-08-03
mojgan daneshmand
2005-08-03
Richard Chang
2005-08-04
Jesse D Fowler
2005-08-03
Guillermo Villanueva
SiO2 over gold
mojgan daneshmand
2005-08-03
Hi everyone,

I am having problem with PECVD SiO2 over gold film. Our oxide film looks
perfectly fine over any surface rather than gold. It cracks over any gold
pattern. Has anyone seen any similar problem? any idea how I can fix the
problem?

Thanks to everyone.
Mojgan
reply
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