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MEMSnet Home: MEMS-Talk: ECR for six inch wafer
ECR for six inch wafer
1998-05-13
Ramadas, Padmaja
ECR for six inch wafer
Ramadas, Padmaja
1998-05-13
I wanted to know where I can get hold of an ECR for six inch. This equipment
would be to get high aspect ratios in polyimide or photoresist.
Thanks in advance.


Padmaja Ramadas                                         (972)-927-1108 (w)
Texas Instruments Incorporated                  (972)-995-7785(fax)
P.O. Box 655012                                                 ramadas@ti.com
M/S 921
Dallas, Texas  75265


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