Hi Mojgan,
I had this problem before, and was able to fix it by cleaning the wafer
thoroughly before PECVD. You can try cleaning in acetone-methanol-DIwater
followed by a dehydration bake, or even 2-3' of piranha if that doesn't
work. The piranha doesn't attack gold, but it may go after your adhesion
layer.

Jesse

mojgan daneshmand  wrote:

Hi everyone,

I am having problem with PECVD SiO2 over gold film. Our oxide film looks
perfectly fine over any surface rather than gold. It cracks over any gold
pattern. Has anyone seen any similar problem? any idea how I can fix the
problem?