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MEMSnet Home: MEMS-Talk: Etching of Al films
Etching of Al films
1998-05-14
Jochen Hetzler
1998-05-14
Jochen Hetzler
Etching of Al films
Jochen Hetzler
1998-05-14
Hello
-----
I'm interested in nanostructuring of 75 nm thick AL (aluminium) films. I
only know some good etch solutions for Cr, who knows some for Al. I prefere
Al because of his higher optical thickness.

Thanks
    Jochen


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