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MEMSnet Home: MEMS-Talk: Au Diffusion
Au Diffusion
1998-05-14
Ron Slocumb
Au Diffusion
Ron Slocumb
1998-05-14
I am looking for anyone who can do high temp.(~900C), long time(~5hrs) Au
diffusion on 6" Si wafers.  If you know of any foundries or research groups
that are capable of this type of process, please let me know.  The purpose of
this process is to kill the lifetime in high power IGBT's.

Thank you,
Ron


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