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MEMSnet Home: MEMS-Talk: +++ Pyrex wafer anodically bonded toThinSilicon:Problem +++
+++ Pyrex wafer anodically bonded toThinSilicon:Problem +++
2005-08-23
Bill Moffat
+++ Pyrex wafer anodically bonded toThinSilicon:Problem +++
Bill Moffat
2005-08-23
Badin,
      What's wrong with plasma bonding.  Simply plasma treat the 2
surfaces and then place in contact.  The surface bonds are disturbed by
the plasma, then placing in contact the bonds interact with a merged
surface.  We have done dissimilar materials as well as identical
materials.


Bill Moffat, CEO
Yield Engineering Systems, Inc.
2185 Oakland Rd., San Jose, CA  95131
(408) 954-8353

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