Hi all,

I thank you for your previous responses. In my process of
PZT/PT/Pt/Cr/SiO2/Si  I have to anneal PZT and Pt(platinum) but as I do not
have RTA in my work place, I am planning to use a tube furnace instead.
Should the annealing of Pt be done specifically in O2 atmosphere to obtain
111 texture or even air/N2 atmosphere in a tube furnace serve the purpose?
What heating rate is advisable (both for Pt and PZT annealing )? Any help
would be appreciated.

regards
Rajib