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MEMSnet Home: MEMS-Talk: solenoid inductor on SOI wafer
solenoid inductor on SOI wafer
2005-09-06
mathew varghese
solenoid inductor on SOI wafer
mathew varghese
2005-09-06
Hello everyone..
      Normally on an SOI wafer are components for eg.. solenoid inductors placed
on the surface of the thin film silicon or is it necessary to suspend them  in
air using support posts so that the signal is not coupled to the substrate
below?
Plz help.

Many thanks.
Regards.
Mathew
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