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MEMSnet Home: MEMS-Talk: Re: Rép. : [mems-talk] Oxidize Silicon
Rép. : [mems-talk] Oxidize Silicon
2005-09-09
Laetitia Philippe
Re:Rép.: [mems-talk] Oxidize Silicon
2005-09-09
cyyfq@bu.edu
Re: Rép. : [mems-talk] Oxidize Silicon
2005-09-09
Jim Beall
Re: Rép. : [mems-talk] Oxidize Silicon
2005-09-09
mizur
Re: Rép. : [mems-talk] Oxidize Silicon
mizur
2005-09-09
Hi Chen,
gold and Silicon have a eutectic point at 363 C so the gold will disolve in
the silicon at any temperature higher than that.
Shay
----- Original Message -----
From: 
To: "General MEMS discussion" ; "Laetitia Philippe"

Cc: 
Sent: Friday, September 09, 2005 6:13 PM
Subject: Re: Rép. : [mems-talk] Oxidize Silicon

> I have Gold pattern on the sample and meling point of Gold is 1064oC.
> if I want to do it at 1000oC or 900oC, what should be the time by your
> expection?
> I do not need to be accurate. 20-50nm of SiO2 is fine
>
reply
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