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MEMSnet Home: MEMS-Talk: RE: Rép. : [mems-talk] Oxidize Silicon
RE: Rép. : [mems-talk] Oxidize Silicon
2005-09-12
ZICKAR Michaël
2005-09-12
Shile
RE: Rép. : [mems-talk] Oxidize Silicon
Shile
2005-09-12
If hot nitric acid does attack the gold you can revise the theory so
that theoretically it will be affected:)

Roger Shile

-----Original Message-----
"... but theoretically it should not be affected."


-----Original Message-----
From: [email protected]
Sent: Freitag, 9. September 2005 18:13
To: General MEMS discussion; Laetitia Philippe
Cc: [email protected]
Subject: Re: Rép. : [mems-talk] Oxidize Silicon

I have Gold pattern on the sample and meling point of Gold is 1064oC. if
I want to do it at 1000oC or 900oC, what should be the time by your
expection? I do not need to be accurate. 20-50nm of SiO2 is fine
reply
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