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MEMSnet Home: MEMS-Talk: who can do 8um oxide deposition on 4" wafers ?
who can do 8um oxide deposition on 4" wafers ?
1998-05-20
Richard A. Brown
who can do 8um oxide deposition on 4" wafers ?
Richard A. Brown
1998-05-20
Does anyone know where I can get ~8 microns of SiO2 deposited on
some 4" wafers ?

(We could do it here by LPCVD, but with 3% silane it would take a very
long time...  Spin-on glass is certainly an option, but for these wafers
I'd prefer to avoid it.)

Thanks in advance,

- r.


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