A MEMS Clearinghouse® and information portal
for the MEMS and Nanotechnology community
RegisterSign-In
MEMSnet Home About Us What is MEMS? Beginner's Guide Discussion Groups Advertise Here
News
MEMSnet Home: MEMS-Talk: Wet/dry etch for Iridium
Wet/dry etch for Iridium
2005-09-23
Kasman , Elina
Wet/dry etch for Iridium
Kasman , Elina
2005-09-23
Does anyone have any information/experience on wet or dry etch for
Iridium film? Masked with photoresist.

Thanks!
Elina

reply
Events
Glossary
Materials
Links
MEMS-talk
Terms of Use | Contact Us | Search
MEMS Exchange
MEMS Industry Group
Coventor
Harrick Plasma
Tanner EDA
Tanner EDA by Mentor Graphics
Harrick Plasma, Inc.
Process Variations in Microsystems Manufacturing
MEMS Technology Review