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MEMSnet Home: MEMS-Talk: selective etching of Alumina from Neodymium
selective etching of Alumina from Neodymium
2005-09-27
绍周
selective etching of Alumina from Neodymium
绍周
2005-09-27
Dear all,

I am trying to find a way to selective etch alumina
from Nd film.But Nd will react with any aqueous
solution. Is that any way to avoid this?

Best wishes!

Li Shaozhou
School of Materials Engineering
Nanyang Technological University


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