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MEMSnet Home: MEMS-Talk: Su-8 double spin possible?
Su-8 double spin possible?
2005-10-19
Jiang Ziling
2005-10-20
Zeta Tak For YU
Su-8 double spin possible?
Jiang Ziling
2005-10-19
Dear all,
  We have Su-8 2025, which is 25um thick at 4000rpm. We want to gain
thickness of 40um so we tried double-spin. We found that edge bead is very
serious and the surface is not so smooth as single spin. Anyone knows any
method to enhance its performance, such as, whether we should bake it after
each spin, and remove edge bead after each spin? What is the usual solvent
used to remove Su8 edge bead? And how?
  cheers
  Jiang Ziling
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