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MEMSnet Home: MEMS-Talk: Negative tone resist
Negative tone resist
2005-10-19
P.E.M. Kuijpers
Negative tone resist
P.E.M. Kuijpers
2005-10-19
Hello all,

Can anyone give me a suggestion about what kind of resist I can use for the
following proces:
- negative tone
- dipcoating (due to the form of the substrate), thickness app. 3-5µm
- broadband exposure, contact mode
- Au plating (app 20 min in Au-plating, cyanide based!)
- good stripping behavior

Thanks in advance.
Peter Kuijpers
Philips Applied Technologies
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