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MEMSnet Home: MEMS-Talk: Need help of large scale 2D MEMS scanner
Need help of large scale 2D MEMS scanner
2005-11-02
Sheng Liu
Need help of large scale 2D MEMS scanner
Sheng Liu
2005-11-02
Hello guys:

I am a graduate student at university of arizona. I am currently taking the
projects of the head-mounted display and eye tracking. I want to use a MEMS chip
in the optical system to achieve 2D scan, but I have some difficulty finding out
the MEMS chip. I have some basic requirement of the MEMS:

Active Area:    20mm~30mm diameter
Axis:              X, Y tilt
Tilt Range:      >±2.5 degree (can be continuously controlled by applied
voltage)
Response time:<1ms the best, still acceptable if <15ms

I did see some papers doing 2D MEMS scanner but the chip size is typically
small. Can anybody give me some information about MEMS companies or research
groups that have the MEMS chips matching my requirements? I would thanks a
million.

Shawn
NOV 2, 2005
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