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MEMSnet Home: MEMS-Talk: HD-8820 Polyimide
SiO2 hydrophilic enhanced?
2005-11-07
Wullinger, Michaela
2005-11-07
Shay Kaplan
HD-8820 Polyimide
2005-11-07
Giuliano Gregori
2005-11-08
walter
2005-11-07
ssood
2005-11-07
sokwon Paik
Crosslink PMMA
2005-12-01
[email protected]
2005-12-02
Fabio Altomare
anodic bonding question
2005-12-02
Robert Dean
2005-12-03
Kirt Williams
2005-11-07
Gary
HD-8820 Polyimide
Giuliano Gregori
2005-11-07
Hi all,
I'd like to use polyimide as sacrificial layer for the fabrication of an
air-bridge.
I'll have to spin it on a SiO2 surface; on part of the top I'll have to
deposit gold and SiO2 again.
I was thinking to use HD-8820 polyimide and I wonder whether this is a
good solution.
Has anybody already used something similar ?   Suggestions ???

Thanks in advance !
Giuliano
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