Dear All,
   I want to etch (110) Si wafer (200~300um thick) to release my
cantilever. However the Al pads for electric contact will be etched too.
So I am wondering if there are other metals that have a high resistance
to KOH? The important thing is that the wafer will be etched for about
2~3 hours in KOH (20% ~ 60%, not decided yet) at 80 degree C.
   Thanks a lot!

HTao